Formation and evolution of intermixing zones in C/Si multilayer under heating von Zhuravel, I.A., Bugayev, Ye.A., Penkov, A.V., Zubarev, E.N., Sevryukova, V.A., Kondratenko, V.V.

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Structural transformation in C/Si multilayer after annealing von Zhuravel, I.O., Bugayev, Ye.A., Konotopsky, L.E., Zubarev, E.M., Sevryukova, V.A., Kondratenko, V.V.

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