The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy von Bondarenko, V.N., Konovalov, V.G., Solodovchenko, S.I., Shtan′, A.F., Ryzhkov, I.V., Voitsenya, V.S., Lytvyn, P.M., Byrka, O.V., Skorik, O.A.

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Simulating study of plasmachemical erosion of a-C:H films in a ECR discharge plasma von Konovalov, V.G., Makhov, M.N., Ryzhkov, I.V., Shapoval, A.N., Shtan’, A.F., Skorik, O.A., Solodovchenko, S.I., Timoshenko, A.I., Voitsenya, V.S.

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