Control of planar magnetron sputtering system operating modes by additional anode magnetic field

за авторством Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.
Опубліковано 2010

TiN coating etching from a surface of the instrument in beam-plasma system

за авторством Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.
Опубліковано 2000

High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge

за авторством Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.
Опубліковано 2012

Ion beam system for nanotrimming of functional microelectronics layers

за авторством Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.
Опубліковано 2011