Control of planar magnetron sputtering system operating modes by additional anode magnetic field

von Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.
Veröffentlicht 2010

Ion beam system for nanotrimming of functional microelectronics layers

von Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.
Veröffentlicht 2011