High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge von Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.

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Control of planar magnetron sputtering system operating modes by additional anode magnetic field von Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.

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TiN coating etching from a surface of the instrument in beam-plasma system von Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.

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Ion beam system for nanotrimming of functional microelectronics layers von Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.

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