Open Science Harvester of NAS of Ukraine

Control of planar magnetron sputtering system operating modes by additional anode magnetic field

by Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.
Published 2010

High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge

by Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.
Published in Вопросы атомной науки и техники (2012)

TiN coating etching from a surface of the instrument in beam-plasma system

by Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.
Published in Вопросы атомной науки и техники (2000)

Ion beam system for nanotrimming of functional microelectronics layers

by Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.
Published in Вопросы атомной науки и техники (2011)