Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation

von D. L. Voronov, Ju. Devizenko, E. N. Zubarev, V. V. Kondratenko, A. V. Penkov, V. A. Sevrjukova, V. V. Bobkov, T. I. Peregon, L. P. Tishchenko
Veröffentlicht 2004