Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation von D. L. Voronov, Ju. Devizenko, E. N. Zubarev, V. V. Kondratenko, A. V. Penkov, V. A. Sevrjukova, V. V. Bobkov, T. I. Peregon, L. P. Tishchenko

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