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Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation

Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation

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Bibliographic Details
Main Authors: D. L. Voronov, Ju. Devizenko, E. N. Zubarev, V. V. Kondratenko, A. V. Penkov, V. A. Sevrjukova, V. V. Bobkov, T. I. Peregon, L. P. Tishchenko
Format: Article
Language:English
Published: 2004
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849735
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Internet

http://jnas.nbuv.gov.ua/article/UJRN-0000849735

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