Formation of flat surfaces of optoelectronic components in diamond polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov

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Influence of parameters of structure of the processed material on polishing indicators optical surfaces за авторством Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, V. A. Kovalov

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Effect of rheological properties of dispersed system on polishing indicators of optical glass and glassceramics за авторством Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, V. A. Kovalov

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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej

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Influence of dielectric characteristics of the processed material, polishing powder and dispersed system on the energy of their interaction during polishing of optical surfaces за авторством Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov

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Material removal rate in polishing of polymer optical materials за авторством Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov

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Transfer energy during the interaction of the optical surface with the polishing dispersion system за авторством Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov

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Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Efficiency of polishing of anisotropic single-crystal materials for optoelectronics за авторством Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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Polished surface roughness of optoelectronic components made of monocrystalline materials за авторством Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide за авторством Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

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Influence of spectroscopic parameters of the processed material and polishing powder for polishing of optical surfaces за авторством Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. V. Harashchenko, V. A. Kovalov

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Precision shaping flat surfaces details of optics and microelectronics when polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Interaction of sludge particles and wear particles of polishing powder during polishing of polymeric optical materials за авторством Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, A. Y. Boiaryntsev, V. A. Kovalov, O. Y. Yurchyshyn

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Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials за авторством Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. Y. Boyarintsev, V. A. Kovalev, O. Y. Yurchyshyn

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Roughness of polished surfaces of optoelectronic elements made of polymeric optical materials за авторством Yu. D. Filatov, V. I. Sidorko, S. V. Sokhan, S. V. Kovalov, A. Y. Boiaryntsev, V. A. Kovalov, O. Y. Yurchyshyn

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Polishing of opto-electronic equipment elements from single-crystal silicon carbide за авторством Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

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