Influence of parameters of structure of the processed material on polishing indicators optical surfaces

von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, V. A. Kovalov
Veröffentlicht 2021

Formation of flat surfaces of optoelectronic components in diamond polishing

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov
Veröffentlicht 2017

Effect of rheological properties of dispersed system on polishing indicators of optical glass and glassceramics

von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, V. A. Kovalov
Veröffentlicht 2021

In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej
Veröffentlicht 2017

Transfer energy during the interaction of the optical surface with the polishing dispersion system

von Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov
Veröffentlicht 2022

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics

von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Veröffentlicht 2016

Polished surface roughness of optoelectronic components made of monocrystalline materials

von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Veröffentlicht 2016

Influence of dielectric characteristics of the processed material, polishing powder and dispersed system on the energy of their interaction during polishing of optical surfaces

von Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov
Veröffentlicht 2022

Material removal rate in polishing of polymer optical materials

von Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. A. Kovalov
Veröffentlicht 2022

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide

von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev
Veröffentlicht 2013

Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin
Veröffentlicht 2017

Influence of spectroscopic parameters of the processed material and polishing powder for polishing of optical surfaces

von Yu. D. Filatov, V. I. Sidorko, Yu. Boiaryntsev, S. V. Kovalov, V. V. Harashchenko, V. A. Kovalov
Veröffentlicht 2022

Precision shaping flat surfaces details of optics and microelectronics when polishing

von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Veröffentlicht 2016

Interaction of sludge particles and wear particles of polishing powder during polishing of polymeric optical materials

von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalov, A. Y. Boiaryntsev, V. A. Kovalov, O. Y. Yurchyshyn
Veröffentlicht 2023

Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials

von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. Y. Boyarintsev, V. A. Kovalev, O. Y. Yurchyshyn
Veröffentlicht 2024

Roughness of polished surfaces of optoelectronic elements made of polymeric optical materials

von Yu. D. Filatov, V. I. Sidorko, S. V. Sokhan, S. V. Kovalov, A. Y. Boiaryntsev, V. A. Kovalov, O. Y. Yurchyshyn
Veröffentlicht 2023

Polishing of opto-electronic equipment elements from single-crystal silicon carbide

von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Veröffentlicht 2015