Effect of electron-beam treatment of sensor glass substrates for SPR devices on their metrological characteristics von Vashchenko, V.A., Yatsenko, I.V., Kovalenko, Yu.I., Kladko, V.P., Gudymenko, O.Yo., Lytvyn, P.M., Korchovyi, A.A., Mamykin, S.V., Kondratenko, O.S., Maslov, V.P., Dorozinska, H.V., Dorozinsky, G.V.

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