Ignition and break-down of the gas discharge in magnetic field by Zykov, A.V., Azarenkov, N.A.

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Широкоапертурный высокочастотный источник ионов низкой энергии с электронной компенсацией by Dudin, S. V., Rafalskyi, D. V., Zykov, A. V.

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The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure by Zykov, A.V., Polozhiy, K.I., Farenik, V.I.

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ПРОБЛЕМА ВЫБОРА ЛУЧШЕГО ТЕХНИЧЕСКОГО РЕШЕНИЯ ДЛЯ ОБЕСПЕЧЕНИЯ ВАКУУМ-ВЫПАРНОЙ УСТАНОВКИ ПОДВОДОМ ТЕПЛА... by Smirnov, H.F., Zykov, A.V., Reznichenko, D.N.

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Oxygen activation effect on reactive magnetron synthesis of alumina coatings by Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.

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Oxygen activation effect on reactive magnetron synthesis of alumina coatings by Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.

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Experimental research of ICP reactor for plasma-chemical etching by Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.

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2D fluid model for interactive development of ICP technological tools by Gapon, A.V., Dahov, A.N., Dudin, S.V., Zykov, A.V., Azarenkov, N.A.

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