Широкоапертурный высокочастотный источник ионов низкой энергии с электронной компенсацией

by Dudin, S. V., Rafalskyi, D. V., Zykov, A. V.
Published 2010

The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure

by Zykov, A.V., Polozhiy, K.I., Farenik, V.I.
Published 2003

Oxygen activation effect on reactive magnetron synthesis of alumina coatings

by Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.
Published 2007

Oxygen activation effect on reactive magnetron synthesis of alumina coatings

by Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.
Published 2007

Experimental research of ICP reactor for plasma-chemical etching

by Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.
Published 2006

2D fluid model for interactive development of ICP technological tools

by Gapon, A.V., Dahov, A.N., Dudin, S.V., Zykov, A.V., Azarenkov, N.A.
Published 2006