Preparation methods for nano-sized structures using films of chalcogenide glassy semiconductors

• Date: 2016
• Main Authors: Petrov, V. V., Lytvyn, P. M., Trunov, M. L., Kryuchyn, A. A., Belyak, E. V., Rubish, V. M., Kostyukevych, S. O., Koptiukh, A. A.
• Format: Article
• Language: Ukrainian
• Published: Інститут проблем реєстрації інформації НАН України 2016
• Subjects: nanorelief structures; chalcogenide vitreous semiconductors; near-field probes; AFM lithography
• Online Access: http://drsp.ipri.kiev.ua/article/view/100341
• Journal Title: Data Recording, Storage & Processing

The analysis of methods of micro- and nanorelief structures recording at chalcogenide vitreous semiconductors films is presented. It is shown that exposing of the chalcogenide vitreous semiconductors films by optical radiation focused by diffraction limited optical systems allows to obtain prints wi...