Buchumschlag

Preparation methods for nano-sized structures using films of chalcogenide glassy semiconductors

The analysis of methods of micro- and nanorelief structures recording at chalcogenide vitreous semiconductors films is presented. It is shown that exposing of the chalcogenide vitreous semiconductors films by optical radiation focused by diffraction limited optical systems allows to obtain prints wi...

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Bibliographische Detailangaben
Datum:	2016
Hauptverfasser:	Petrov, V. V., Lytvyn, P. M., Trunov, M. L., Kryuchyn, A. A., Belyak, E. V., Rubish, V. M., Kostyukevych, S. O., Koptiukh, A. A.
Format:	Artikel
Sprache:	Ukrainisch
Veröffentlicht:	Інститут проблем реєстрації інформації НАН України 2016
Schlagworte:	nanorelief structures chalcogenide vitreous semiconductors near-field probes AFM lithography
Online Zugang:	http://drsp.ipri.kiev.ua/article/view/100341
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Data Recording, Storage & Processing

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Data Recording, Storage & Processing

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