A research of typical sources of errors in the manufacture of raster optical elements by laser recording systems with circular scanning

• Дата: 2025
• Автор: Косяк, І. В.
• Формат: Стаття
• Мова: Українська
• Опубліковано: Інститут проблем реєстрації інформації НАН України 2025
• Теми: optical structures; laser recording; encoder; optical element; substrate
• Онлайн доступ: https://drsp.ipri.kiev.ua/article/view/354561
• Назва журналу: Data Recording, Storage & Processing

An analysis and research of typical sources of errors that arise in the manufacture of raster optical elements by laser recording systems with circular scanning are carried out. The features of the development and construction of circular laser recording systems are considered. Methods for reducing the influence of errors when recording raster optical elements by a circular laser recording system are proposed. Today, scanning beam recording methods (electron or laser) are widely used to form the microrelief of raster, diffraction and micro-optical elements. They are based on scanning the surface of the substrate covered with a recording layer with a focused amplitude-modulated laser beam. Scanning methods of direct laser recording are the most universal. The recording beam moves along specified trajectories. These trajectories are straight lines (in a rectangular coordinate system) or circles and spirals (in a polar coordinate system). Laser lithography technology allows for the production and replication of a wide range of different optical structures and micro-optical elements. Taking into account the above, when choosing a method for manufacturing raster and diffractive optical elements, it is necessary to take into account the features of their application. In the production of various radial optical structures such as optical encoders, coding disks and angle scales, it is better to use circular laser recording systems operating in polar coordinates. This study presents an analysis of the most typical sources of recording errors on a circular laser recording system and considers the features of the recording method with laser beam addressing in a polar coordinate system. The purpose of the research is to reduce the impact of errors when recording raster optical elements on the created circular laser recording system. An analysis and experimental research of typical sources of errors that arise when recording radial optical structures on a circular laser recording system were performed. It is shown that the created laser recording system with circular scanning has sources of errors that lead to a shift in the recording coordinate. The error in determining the origin of coordinates, caused by the coincidence of the center of the axis of rotation of the recording system spindle and the center of the polar coordinate system, was eliminated. It is proposed to reduce the error in the angular coordinate caused by the operation of the encoder to replace the encoder in which there will be significantly more than 3600 optical strokes. The current tasks remain to increase the resolution of recording elements of optical structures and improve optical, mechanical and electronic units. Fig.: 5. Refs: 11 titles.