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Investigation of characteristics of non-simultaneous arc discharge in titanium vapors in glow discharge electron evaporators

Investigation of characteristics of non-simultaneous arc discharge in titanium vapors in glow discharge electron evaporators

Investigations of simultaneous applying of high voltage glow discharge (HVGD) and non-self-maintained low-pressure arc discharge for obtaining high-quality titanium nitride coatings are provided. Obtained results are compared with experiments, provided on experimental technological equipment. Provid...

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Bibliographic Details
Main Authors: Denbnovetskiy, S.V., Melnyk, V.I., Melnyk, I.V., Tugay, B.A., Porytskyy, P.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
Series:Вопросы атомной науки и техники
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/110505
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http://dspace.nbuv.gov.ua/handle/123456789/110505

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