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Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials

In the model of nonlocal thermoelastic peak of low-energy ion a formula for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of DC and pulse bias potentials is derived. Calculation of intrinsic stress σ depending on bias potential U in coati...

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Bibliographic Details
Main Authors: Kalinichenko, A.I., Kozionov, S.A., Strelnitskij, V.E.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
Series:Вопросы атомной науки и техники
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/111764
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