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Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN

Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN

For multilayer coating system ZrN/CrN determined the effect of the pressure of the working atmosphere of nitrogen (PN), DC (-Us) and pulse (-Ui) negative bias potential during the deposition and the thickness of the layers in the period on the phase composition, texture, substructural characteristic...

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Bibliographic Details
Main Authors: Sobol, O.V., Andreev, A.A., Gorban, V.F., Stolbovoy, V.A., Meylekhov, A.A., Postelnyk, A.A., Dolomanov, A.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
Series:Вопросы атомной науки и техники
Subjects:
Физика и технология конструкционных материалов
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/111771
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http://dspace.nbuv.gov.ua/handle/123456789/111771

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