Influence of secondary electron emission on the RF gas breakdown
The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are conducted in the discharge chamber with asymmetric electrodes which is frequently...
Збережено в:
| Дата: | 2013 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/111947 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Influence of secondary electron emission on the RF gas breakdown / A.N. Dakhov, S.V. Dudin // Вопросы атомной науки и техники. — 2013. — № 4. — С. 149-154. — Бібліогр.: 22 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are conducted in the discharge chamber with asymmetric electrodes which is frequently used in technological applications. As a result, the physical mechanism of secondary electron participation in the RF breakdown has been revealed. |
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