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Peculiarities of glow modes of argon atmospheric pressure radio-frequency capacitive discharge with isolated electrodes
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in low-current α and highcurrent γ modes are determined experimentally. It is shown that transition from α mode to γ mode occurs through a phase of coexistence of both modes in different parts of the discharge gap....
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/112185 |
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