Probe formation in proton beam writing facility at IAP NASU
The principles of a proton beam writing facility were described. Particular attention was paid to the problem of probe-forming system design. It was shown that using of separate systems and parts of the scanning nuclear microprobe is the most effective solution. Various probe-forming system configur...
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| Date: | 2015 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/112234 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Probe formation in proton beam writing facility at IAP NASU / O.S. Lapin, A.G. Ponomarev // Вопросы атомной науки и техники. — 2015. — № 4. — С. 57-61. — Бібліогр.: 19 назв. — англ. |