Optical characterization of thin Au films by standard and polaritonic ellipsometry
This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative expe...
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Дата: | 2003 |
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Автори: | , , , |
Формат: | Стаття |
Мова: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2003
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Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118041 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Цитувати: | Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ. |
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irk-123456789-1180412017-05-29T03:03:55Z Optical characterization of thin Au films by standard and polaritonic ellipsometry Dmitruk, N.L. Fursenko, O.V. Kondratenko, O.S. Romanyuk, V.R. This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative experimental evaluation of the precision of determined optical parameters (refractive index n and absorption coefficient k) and thickness for both ellipsometric modes has been studied by calculation of their sensitivity correlation coefficients. Medium- and mode-related optical constants of Au films were revealed. In the ATR mode the effective optical parameters were higher then in the standard mode, n decreased and k increased with increasing the refractive index of adjoining medium. This effect must be taken into consideration in polaritonic optoelectronic and optochemical sensor technique. 2003 Article Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ. 1560-8034 PACS: 78.66.Bz, 78.66.-w http://dspace.nbuv.gov.ua/handle/123456789/118041 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
language |
English |
description |
This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative experimental evaluation of the precision of determined optical parameters (refractive index n and absorption coefficient k) and thickness for both ellipsometric modes has been studied by calculation of their sensitivity correlation coefficients. Medium- and mode-related optical constants of Au films were revealed. In the ATR mode the effective optical parameters were higher then in the standard mode, n decreased and k increased with increasing the refractive index of adjoining medium. This effect must be taken into consideration in polaritonic optoelectronic and optochemical sensor technique. |
format |
Article |
author |
Dmitruk, N.L. Fursenko, O.V. Kondratenko, O.S. Romanyuk, V.R. |
spellingShingle |
Dmitruk, N.L. Fursenko, O.V. Kondratenko, O.S. Romanyuk, V.R. Optical characterization of thin Au films by standard and polaritonic ellipsometry Semiconductor Physics Quantum Electronics & Optoelectronics |
author_facet |
Dmitruk, N.L. Fursenko, O.V. Kondratenko, O.S. Romanyuk, V.R. |
author_sort |
Dmitruk, N.L. |
title |
Optical characterization of thin Au films by standard and polaritonic ellipsometry |
title_short |
Optical characterization of thin Au films by standard and polaritonic ellipsometry |
title_full |
Optical characterization of thin Au films by standard and polaritonic ellipsometry |
title_fullStr |
Optical characterization of thin Au films by standard and polaritonic ellipsometry |
title_full_unstemmed |
Optical characterization of thin Au films by standard and polaritonic ellipsometry |
title_sort |
optical characterization of thin au films by standard and polaritonic ellipsometry |
publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
publishDate |
2003 |
url |
http://dspace.nbuv.gov.ua/handle/123456789/118041 |
citation_txt |
Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ. |
series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
work_keys_str_mv |
AT dmitruknl opticalcharacterizationofthinaufilmsbystandardandpolaritonicellipsometry AT fursenkoov opticalcharacterizationofthinaufilmsbystandardandpolaritonicellipsometry AT kondratenkoos opticalcharacterizationofthinaufilmsbystandardandpolaritonicellipsometry AT romanyukvr opticalcharacterizationofthinaufilmsbystandardandpolaritonicellipsometry |
first_indexed |
2023-10-18T20:31:12Z |
last_indexed |
2023-10-18T20:31:12Z |
_version_ |
1796150413806796800 |