Optical characterization of thin Au films by standard and polaritonic ellipsometry

This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative expe...

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Дата:2003
Автори: Dmitruk, N.L., Fursenko, O.V., Kondratenko, O.S., Romanyuk, V.R.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
Назва видання:Semiconductor Physics Quantum Electronics & Optoelectronics
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/118041
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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spelling irk-123456789-1180412017-05-29T03:03:55Z Optical characterization of thin Au films by standard and polaritonic ellipsometry Dmitruk, N.L. Fursenko, O.V. Kondratenko, O.S. Romanyuk, V.R. This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative experimental evaluation of the precision of determined optical parameters (refractive index n and absorption coefficient k) and thickness for both ellipsometric modes has been studied by calculation of their sensitivity correlation coefficients. Medium- and mode-related optical constants of Au films were revealed. In the ATR mode the effective optical parameters were higher then in the standard mode, n decreased and k increased with increasing the refractive index of adjoining medium. This effect must be taken into consideration in polaritonic optoelectronic and optochemical sensor technique. 2003 Article Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ. 1560-8034 PACS: 78.66.Bz, 78.66.-w http://dspace.nbuv.gov.ua/handle/123456789/118041 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description This work is aimed at optical characterization of thin Au films by multiple-angle-of-incidence reflectance ellipsometry at the fixed wavelength (632.8 nm) in standard and attenuated total reflection (ATR) modes in contact with different dielectric media (water, alcohol and air). The comparative experimental evaluation of the precision of determined optical parameters (refractive index n and absorption coefficient k) and thickness for both ellipsometric modes has been studied by calculation of their sensitivity correlation coefficients. Medium- and mode-related optical constants of Au films were revealed. In the ATR mode the effective optical parameters were higher then in the standard mode, n decreased and k increased with increasing the refractive index of adjoining medium. This effect must be taken into consideration in polaritonic optoelectronic and optochemical sensor technique.
format Article
author Dmitruk, N.L.
Fursenko, O.V.
Kondratenko, O.S.
Romanyuk, V.R.
spellingShingle Dmitruk, N.L.
Fursenko, O.V.
Kondratenko, O.S.
Romanyuk, V.R.
Optical characterization of thin Au films by standard and polaritonic ellipsometry
Semiconductor Physics Quantum Electronics & Optoelectronics
author_facet Dmitruk, N.L.
Fursenko, O.V.
Kondratenko, O.S.
Romanyuk, V.R.
author_sort Dmitruk, N.L.
title Optical characterization of thin Au films by standard and polaritonic ellipsometry
title_short Optical characterization of thin Au films by standard and polaritonic ellipsometry
title_full Optical characterization of thin Au films by standard and polaritonic ellipsometry
title_fullStr Optical characterization of thin Au films by standard and polaritonic ellipsometry
title_full_unstemmed Optical characterization of thin Au films by standard and polaritonic ellipsometry
title_sort optical characterization of thin au films by standard and polaritonic ellipsometry
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
publishDate 2003
url http://dspace.nbuv.gov.ua/handle/123456789/118041
citation_txt Optical characterization of thin Au films by standard and polaritonic ellipsometry / N.L. Dmitruk, O.V. Fursenko, O.S. Kondratenko, V.R. Romanyuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 3. — С. 349-353. — Бібліогр.: 11 назв. — англ.
series Semiconductor Physics Quantum Electronics & Optoelectronics
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