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Structural and optical properties of Zn₁₋xCoxO thin films prepared by RF reactive sputtering technique

Structural and optical properties of Zn₁₋xCoxO thin films prepared by RF reactive sputtering technique

We have reported the effect of Co doping on structural and optical properties of ZnO thin films prepared by the RF reactive sputtering technique. The composite targets were formed by mixing and pressing ZnO and CoO powders. The thin films were deposited on silica and glass substrates. The structu...

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Bibliographic Details
Main Authors: Savchuk, A.I., Stolyarchuk, I.D., Stefanuk, I., Cieniek, B., Sheregii, E.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2014
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/118411
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http://dspace.nbuv.gov.ua/handle/123456789/118411

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