Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications
Nanoscale tin dioxide (SnO₂) and zinc oxide (ZnO) layers are considered as promising candidates for preparation of sensing elements for metal oxide semiconductor gas sensors. Tin dioxide films deposited by direct current magnetron sputtering are investigated. The influence of deposition temperatu...
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| Дата: | 2014 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2014
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118415 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications / N.P. Klochko, K.S. Klepikova, G.S. Khrypunov, O.V. Pirohov, V.A. Novikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 358-367. — Бібліогр.: 16 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-118415 |
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dspace |
| spelling |
irk-123456789-1184152017-05-31T03:05:34Z Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications Klochko, N.P. Klepikova, K.S. Khrypunov, G.S. Pirohov, O.V. Novikov, V.A. Nanoscale tin dioxide (SnO₂) and zinc oxide (ZnO) layers are considered as promising candidates for preparation of sensing elements for metal oxide semiconductor gas sensors. Tin dioxide films deposited by direct current magnetron sputtering are investigated. The influence of deposition temperature and annealing on the structure and electrical properties of the tin dioxide films are considered. The development of design and technological solution of active layer with high gas sensitivity, reproducibility and stability is offered. Studies of effects of the pulse electrodeposition regimes on structural and substructural parameters and on morphology of zinc oxide arrays made it possible to identify modes that are optimal for formation of hierarchical nanostructures with large specific surface area suitable for gas sensing applications. 2014 Article Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications / N.P. Klochko, K.S. Klepikova, G.S. Khrypunov, O.V. Pirohov, V.A. Novikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 358-367. — Бібліогр.: 16 назв. — англ. 1560-8034 PACS 81.40.-z http://dspace.nbuv.gov.ua/handle/123456789/118415 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
Nanoscale tin dioxide (SnO₂) and zinc oxide (ZnO) layers are considered as
promising candidates for preparation of sensing elements for metal oxide semiconductor
gas sensors. Tin dioxide films deposited by direct current magnetron sputtering are
investigated. The influence of deposition temperature and annealing on the structure and
electrical properties of the tin dioxide films are considered. The development of design
and technological solution of active layer with high gas sensitivity, reproducibility and
stability is offered. Studies of effects of the pulse electrodeposition regimes on structural
and substructural parameters and on morphology of zinc oxide arrays made it possible to
identify modes that are optimal for formation of hierarchical nanostructures with large
specific surface area suitable for gas sensing applications. |
| format |
Article |
| author |
Klochko, N.P. Klepikova, K.S. Khrypunov, G.S. Pirohov, O.V. Novikov, V.A. |
| spellingShingle |
Klochko, N.P. Klepikova, K.S. Khrypunov, G.S. Pirohov, O.V. Novikov, V.A. Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Klochko, N.P. Klepikova, K.S. Khrypunov, G.S. Pirohov, O.V. Novikov, V.A. |
| author_sort |
Klochko, N.P. |
| title |
Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| title_short |
Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| title_full |
Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| title_fullStr |
Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| title_full_unstemmed |
Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| title_sort |
nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2014 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118415 |
| citation_txt |
Nanoscale tin dioxide films and zinc oxide hierarchical
nanostructures for gas sensing applications / N.P. Klochko, K.S. Klepikova, G.S. Khrypunov, O.V. Pirohov, V.A. Novikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 358-367. — Бібліогр.: 16 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
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| first_indexed |
2023-10-18T20:32:05Z |
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