Compact-sized excimer laser with two-side preionization
Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The...
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| Видавець: | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
|---|---|
| Дата: | 2010 |
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118566 |
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| Цитувати: | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
Репозиторії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-118566 |
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dspace |
| spelling |
irk-123456789-1185662017-05-31T03:07:44Z Compact-sized excimer laser with two-side preionization Baschenko, S.M. Marchenko, L.S. Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis height of beam in combination with low weight of laser (5 kg) allow this laser to be used in various optical schemes, where traditional, typical bulky ecximer lasers are unapplicable. Moreover, small dimensions, low weight in combination with low energy consumption (a few watts) allow them to be used in clear “field” conditions. Beside abovementioned characteristics, the designed laser differs from the traditional ones by two-side preionization that has a “spark” character near the “hot” massive electrode and the so-called “capacitive” or “barrier” one under the ground grid. This two-side preionization provides both igniting and sustaining of wider discharge thus allowing to reach beam with higher symmetry – its cross-section is 15×20 mm². 2010 Article Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. 1560-8034 PACS 42.55.Lt http://dspace.nbuv.gov.ua/handle/123456789/118566 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm². |
| format |
Article |
| author |
Baschenko, S.M. Marchenko, L.S. |
| spellingShingle |
Baschenko, S.M. Marchenko, L.S. Compact-sized excimer laser with two-side preionization Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Baschenko, S.M. Marchenko, L.S. |
| author_sort |
Baschenko, S.M. |
| title |
Compact-sized excimer laser with two-side preionization |
| title_short |
Compact-sized excimer laser with two-side preionization |
| title_full |
Compact-sized excimer laser with two-side preionization |
| title_fullStr |
Compact-sized excimer laser with two-side preionization |
| title_full_unstemmed |
Compact-sized excimer laser with two-side preionization |
| title_sort |
compact-sized excimer laser with two-side preionization |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2010 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118566 |
| citation_txt |
Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT baschenkosm compactsizedexcimerlaserwithtwosidepreionization AT marchenkols compactsizedexcimerlaserwithtwosidepreionization |
| first_indexed |
2023-10-18T20:32:31Z |
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2023-10-18T20:32:31Z |
| _version_ |
1796150462913708032 |