2025-02-23T03:29:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-118721%22&qt=morelikethis&rows=5
2025-02-23T03:29:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-118721%22&qt=morelikethis&rows=5
2025-02-23T03:29:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T03:29:25-05:00 DEBUG: Deserialized SOLR response
Mechanical scanning probe nanolithography: modeling and application

Mechanical scanning probe nanolithography: modeling and application

The paper presents a study on modeling the mechanical interaction between the tip of a scanning atomic force microscope (AFM) and surfaces of various types, which makes it possible to optimize parameters and modes for mechanical AFM nanolithography. The practical assessment of mechanical nanoprob...

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Bibliographic Details
Main Authors: Lytvyn, P.M., Lytvyn, O.S., Dyachyns’ka, O.M., Grytsenko, K.P., Schrader, S., Prokopenko, I.V.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2012
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/118721
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http://dspace.nbuv.gov.ua/handle/123456789/118721

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