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2025-02-23T08:45:40-05:00 DEBUG: Deserialized SOLR response
Mechanical scanning probe nanolithography: modeling and application
The paper presents a study on modeling the mechanical interaction between the tip of a scanning atomic force microscope (AFM) and surfaces of various types, which makes it possible to optimize parameters and modes for mechanical AFM nanolithography. The practical assessment of mechanical nanoprob...
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| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2012
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| Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/118721 |
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