Recording the high efficient diffraction gratings by using He-Cd laser

Recording the high efficient diffraction gratings by using He-Cd laser

High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy reve...

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Дата:2004
Автори: Kostyukevych, S.A., Morozovska, A.N., Minko, V.I., Shepeliavyi, P.E., Kudryavtsev, A.A., Rubish, V.M., Rubish, V.V., Tverdokhleb, I.V., Kostiukevych, A.S., Dyrda, S.V.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2004
Назва видання:Semiconductor Physics Quantum Electronics & Optoelectronics
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/119231
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-119231
record_format dspace
spelling irk-123456789-1192312017-06-06T03:03:37Z Recording the high efficient diffraction gratings by using He-Cd laser Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency. 2004 Article Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. 1560-8034 PACS:42.40.Eq, 42.70.Ln http://dspace.nbuv.gov.ua/handle/123456789/119231 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency.
format Article
author Kostyukevych, S.A.
Morozovska, A.N.
Minko, V.I.
Shepeliavyi, P.E.
Kudryavtsev, A.A.
Rubish, V.M.
Rubish, V.V.
Tverdokhleb, I.V.
Kostiukevych, A.S.
Dyrda, S.V.
spellingShingle Kostyukevych, S.A.
Morozovska, A.N.
Minko, V.I.
Shepeliavyi, P.E.
Kudryavtsev, A.A.
Rubish, V.M.
Rubish, V.V.
Tverdokhleb, I.V.
Kostiukevych, A.S.
Dyrda, S.V.
Recording the high efficient diffraction gratings by using He-Cd laser
Semiconductor Physics Quantum Electronics & Optoelectronics
author_facet Kostyukevych, S.A.
Morozovska, A.N.
Minko, V.I.
Shepeliavyi, P.E.
Kudryavtsev, A.A.
Rubish, V.M.
Rubish, V.V.
Tverdokhleb, I.V.
Kostiukevych, A.S.
Dyrda, S.V.
author_sort Kostyukevych, S.A.
title Recording the high efficient diffraction gratings by using He-Cd laser
title_short Recording the high efficient diffraction gratings by using He-Cd laser
title_full Recording the high efficient diffraction gratings by using He-Cd laser
title_fullStr Recording the high efficient diffraction gratings by using He-Cd laser
title_full_unstemmed Recording the high efficient diffraction gratings by using He-Cd laser
title_sort recording the high efficient diffraction gratings by using he-cd laser
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
publishDate 2004
url http://dspace.nbuv.gov.ua/handle/123456789/119231
citation_txt Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ.
series Semiconductor Physics Quantum Electronics & Optoelectronics
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first_indexed 2023-10-18T20:34:04Z
last_indexed 2023-10-18T20:34:04Z
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