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2025-02-23T07:13:06-05:00 DEBUG: Deserialized SOLR response

Low-temperature growth of diamond films using supersonic DC arcjet

Diamond film growth on silicon at substrate temperature between 180 to 360 oC has been studied. The influence of hydrocarbon source on growth conditions and on diamond quality has been also investigated. Several series of experiments were performed to investigate the influence of substrate temperatu...

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Bibliographic Details
Main Authors: Romanyuk, A., Gottler, H., Popov, V.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2001
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/119272
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