Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates
A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the...
Збережено в:
| Дата: | 2002 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2002
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/119563 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-119563 |
|---|---|
| record_format |
dspace |
| spelling |
irk-123456789-1195632017-06-08T03:03:10Z Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates Tkach, V.N. A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the lattice planes intersecting a polished surface of a plate characterizes the perfection degree of the disturbed layer, is of a periodic nature and exhibits a tendency to damp deep within the plate. 2002 Article Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. 1560-8034 PACS: 61.10.N, 61.66, 68.35.B http://dspace.nbuv.gov.ua/handle/123456789/119563 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the lattice planes intersecting a polished surface of a plate characterizes the perfection degree of the disturbed layer, is of a periodic nature and exhibits a tendency to damp deep within the plate. |
| format |
Article |
| author |
Tkach, V.N. |
| spellingShingle |
Tkach, V.N. Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Tkach, V.N. |
| author_sort |
Tkach, V.N. |
| title |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_short |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_full |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_fullStr |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_full_unstemmed |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_sort |
divergent-beam x-ray structural studies of a disturbed surface layer in silicon plates |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2002 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/119563 |
| citation_txt |
Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT tkachvn divergentbeamxraystructuralstudiesofadisturbedsurfacelayerinsiliconplates |
| first_indexed |
2023-10-18T20:34:52Z |
| last_indexed |
2023-10-18T20:34:52Z |
| _version_ |
1796150573712539648 |