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Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up...

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Bibliographic Details
Main Authors: Vovk, E.A., Budnikov, A.T., Nizhankovskyi, S.V., Kryvonogov, S.I., Krukhmalev, A.A., Dobrotvorskaya, M.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2013
Series:Functional Materials
Subjects:
Technology
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/120073
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http://dspace.nbuv.gov.ua/handle/123456789/120073

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