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Chemical dissolution of indium arsenide in the Br₂-HBr solutions

Chemical dissolution of indium arsenide in the Br₂-HBr solutions

The nature and kinetics of InAs chemical dissolution and chemical cutting, in the bromine solutions in hydrobromic acid have been investigated. It was shown that at low (up to 6 vol.%) bromine concentrations the InAs dissolution rate grows linearly with bromine concentration. Such solutions may be u...

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Bibliographic Details
Main Authors: Tomashik, Z.F., Danylenko, S.G., Tomashik, V.N., Kravetski, M.Yu.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 1999
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/120255
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http://dspace.nbuv.gov.ua/handle/123456789/120255

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