2025-02-23T06:56:59-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-120560%22&qt=morelikethis&rows=5
2025-02-23T06:56:59-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-120560%22&qt=morelikethis&rows=5
2025-02-23T06:56:59-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T06:56:59-05:00 DEBUG: Deserialized SOLR response

Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics

As a result of research of polishing single crystal materials it is shown that the material removal rate of the processed material depends on the volumetric wear coefficient and friction path length of element of the processed surface on the surface of lapping. It is found that the polishing flat su...

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Bibliographic Details
Main Authors: Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Y.D., Vetrov, A.G.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2016
Series:Functional Materials
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/120560
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