2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-121124%22&qt=morelikethis&rows=5
2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-121124%22&qt=morelikethis&rows=5
2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T11:15:31-05:00 DEBUG: Deserialized SOLR response
Borophosphosilicate glass component analysis using secondary neutral mass spectrometry

Borophosphosilicate glass component analysis using secondary neutral mass spectrometry

In the present study the SNMS technique for the quantitative component analysis of the borophosphosilicate glass layers was used. These layers were deposited on the silicon substrate by chemical vapor deposition method. The charge-up of the surface is compensated by plasma gas electrons in the high...

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Bibliographic Details
Main Authors: Oberemok, O., Lytvyn, P.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2002
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/121124
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2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-121124%22&qt=morelikethis
2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-121124%22&qt=morelikethis
2025-02-23T11:15:31-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T11:15:31-05:00 DEBUG: Deserialized SOLR response

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