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Intrinsic stresses in multi-component nitride coatings produced by plasma immersion ion implantation
In model of nonlocal thermoelastic peak of low energy ion the process of intrinsic stress formation in the multi-component coatings CrN, Cr₀.₅Al₀.₅ N, TiN, Ti₀.₅Al₀.₅N, deposited by vacuum arc method from ion beams Cr⁺, Cr⁺₀.₅Al⁺₀.₅, Ti⁺, Ti⁺₀.₅Al⁺₀.₅ in direct current (DC) and pulsed potential mode...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/122176 |
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