Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films
Electric resistivity and microstructure of silicon-doped (5 to 38 at. % Si) amorphous carbon (α-C) films deposited by de magnetron sputtering in argon plasma of composed (graphite + single crystalline silicon) target has been studied as a function of silicon content in films. The film resistivity pa...
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| Дата: | 2006 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2006
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| Назва видання: | Functional Materials |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/135059 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films / A.A. Onoprienko, I.B. Yanchuk // Functional Materials. — 2006. — Т. 13, № 4. — С. 652-656. — Бібліогр.: 17 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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| spelling |
irk-123456789-1350592018-06-15T03:07:15Z Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films Onoprienko, A.A. Yanchuk, I.B. Electric resistivity and microstructure of silicon-doped (5 to 38 at. % Si) amorphous carbon (α-C) films deposited by de magnetron sputtering in argon plasma of composed (graphite + single crystalline silicon) target has been studied as a function of silicon content in films. The film resistivity parallel and perpendicular to substrate surface was measured. The film structure was studied by electron diffraction and Raman spectroscopy. Doping with silicon did not influence the resistivity p⊥ over the whole range of silicon concentrations studied, but resulted in marked increase in resistivity p║. Incorporation of silicon atoms into graphite-like cluster structure of carbon films results in distortion and disordering thereof in planes parallel to the substrate surface, thus promoting an increase in p║. 2006 Article Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films / A.A. Onoprienko, I.B. Yanchuk // Functional Materials. — 2006. — Т. 13, № 4. — С. 652-656. — Бібліогр.: 17 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135059 en Functional Materials НТК «Інститут монокристалів» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
Electric resistivity and microstructure of silicon-doped (5 to 38 at. % Si) amorphous carbon (α-C) films deposited by de magnetron sputtering in argon plasma of composed (graphite + single crystalline silicon) target has been studied as a function of silicon content in films. The film resistivity parallel and perpendicular to substrate surface was measured. The film structure was studied by electron diffraction and Raman spectroscopy. Doping with silicon did not influence the resistivity p⊥ over the whole range of silicon concentrations studied, but resulted in marked increase in resistivity p║. Incorporation of silicon atoms into graphite-like cluster structure of carbon films results in distortion and disordering thereof in planes parallel to the substrate surface, thus promoting an increase in p║. |
| format |
Article |
| author |
Onoprienko, A.A. Yanchuk, I.B. |
| spellingShingle |
Onoprienko, A.A. Yanchuk, I.B. Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films Functional Materials |
| author_facet |
Onoprienko, A.A. Yanchuk, I.B. |
| author_sort |
Onoprienko, A.A. |
| title |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films |
| title_short |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films |
| title_full |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films |
| title_fullStr |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films |
| title_full_unstemmed |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films |
| title_sort |
stydy on resistivity and micostructure of magnetron sputtered α-c:si films |
| publisher |
НТК «Інститут монокристалів» НАН України |
| publishDate |
2006 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/135059 |
| citation_txt |
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films / A.A. Onoprienko, I.B. Yanchuk // Functional Materials. — 2006. — Т. 13, № 4. — С. 652-656. — Бібліогр.: 17 назв. — англ. |
| series |
Functional Materials |
| work_keys_str_mv |
AT onoprienkoaa stydyonresistivityandmicostructureofmagnetronsputteredacsifilms AT yanchukib stydyonresistivityandmicostructureofmagnetronsputteredacsifilms |
| first_indexed |
2023-10-18T21:09:24Z |
| last_indexed |
2023-10-18T21:09:24Z |
| _version_ |
1796152066086797312 |