Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films von Onoprienko, A.A., Yanchuk, I.B.

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Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B₄C target von Onoprienko, A.A., Ivashchenko, V.I., Timofeeva, I.I., Sinelnitchenko, А.К., Butenko, О.А.

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Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target von Onoprienko, A.A., Ivashchenko, V.I., Kozak, A.O., Sinelnichenko, A.K., Tomila, T.V.

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