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Structure and stress state of ion-plasma hafnium condensates

Structure and stress state of ion-plasma hafnium condensates

The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in t...

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Bibliographic Details
Main Authors: Vus, A.S., Malykhin, S.V., Pugachev, A.T., Reshetnyak, E.N., Azhazha, R.V., Kovtun, K.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2007
Series:Functional Materials
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/136491
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http://dspace.nbuv.gov.ua/handle/123456789/136491

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