Structure and stress state of ion-plasma hafnium condensates

• Дата: 2007
• Автори: Vus, A.S., Malykhin, S.V., Pugachev, A.T., Reshetnyak, E.N., Azhazha, R.V., Kovtun, K.V.
• Формат: Стаття
• Мова: English
• Опубліковано: НТК «Інститут монокристалів» НАН України 2007
• Назва видання: Functional Materials
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/136491
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ.

The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in t...