Synthesis of charged silica films of porous structure
A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated....
Збережено в:
| Дата: | 2008 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2008
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| Назва видання: | Functional Materials |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/137233 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-137233 |
|---|---|
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dspace |
| spelling |
irk-123456789-1372332018-06-18T03:04:34Z Synthesis of charged silica films of porous structure Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. Technology A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated. The films have been shown to be similar in structure to silica aerogel. The films using in the semiconductor microelectronics, in particular, for sensors and solar cells is proposed. 2008 Article Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/137233 en Functional Materials НТК «Інститут монокристалів» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Technology Technology |
| spellingShingle |
Technology Technology Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. Synthesis of charged silica films of porous structure Functional Materials |
| description |
A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated. The films have been shown to be similar in structure to silica aerogel. The films using in the semiconductor microelectronics, in particular, for sensors and solar cells is proposed. |
| format |
Article |
| author |
Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. |
| author_facet |
Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. |
| author_sort |
Zharkikh, Yu.S. |
| title |
Synthesis of charged silica films of porous structure |
| title_short |
Synthesis of charged silica films of porous structure |
| title_full |
Synthesis of charged silica films of porous structure |
| title_fullStr |
Synthesis of charged silica films of porous structure |
| title_full_unstemmed |
Synthesis of charged silica films of porous structure |
| title_sort |
synthesis of charged silica films of porous structure |
| publisher |
НТК «Інститут монокристалів» НАН України |
| publishDate |
2008 |
| topic_facet |
Technology |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/137233 |
| citation_txt |
Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. |
| series |
Functional Materials |
| work_keys_str_mv |
AT zharkikhyus synthesisofchargedsilicafilmsofporousstructure AT lysochenkosv synthesisofchargedsilicafilmsofporousstructure AT pylypenkooa synthesisofchargedsilicafilmsofporousstructure AT tretyakov synthesisofchargedsilicafilmsofporousstructure |
| first_indexed |
2023-10-18T21:15:50Z |
| last_indexed |
2023-10-18T21:15:50Z |
| _version_ |
1796152349577707520 |