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The use of plasma-based deposition with ion implantation technology to produce superhard molybdenum-based coatings in a mixed (C₂H₂+N₂) atmosphere
The influence of the pressure of a mixed gaseous atmosphere (80%C₂H₂+20%N₂) and the supply of a high-voltage negative potential in a pulsed form on the elemental and phase composition, structure and physico-mechanical characteristics of the vacuum-arc molybdenum-based coatings. It is shown that in t...
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Main Authors: | , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/137340 |
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