Multilayer film heterostructures. Silicides
The formation of heterostructures based on nanoscale silicide films in limiting states are exemplified. The nanoscale silicide films of a required phase composition are shown to be obtainable by formation of specific zones, different type interlayers referred to as the diffusion-controlling layers b...
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| Datum: | 2009 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
НТК «Інститут монокристалів» НАН України
2009
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| Schriftenreihe: | Functional Materials |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/138937 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Multilayer film heterostructures. Silicides // S.I. Sidorenko, Yu.N. Makogon, E.P. Pavlova, S.M. Voloshko // Functional Materials. — 2009. — Т. 16, № 4. — С. 445-447. — Бібліогр.: 8 назв. — англ. |