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Features of diffusion mixing in Mo/Si multilayers

Features of diffusion mixing in Mo/Si multilayers

X-ray photoelectron spectroscopy, transmission electron microscopy, and and low-angle X-ray diffraction were used to investigate the diffusion intermixing in multilayer periodic Mo/Si coatings during manufacturing and heating at 340-380 ℃. It is shown that the mixed zones in the initial state consis...

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Bibliographic Details
Main Authors: Penkov, A.V., Voronov, D.L., Devizenko, A.Yu., Ponomarenko, A.G., Zubarev, E.N.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2005
Series:Functional Materials
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/139320
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http://dspace.nbuv.gov.ua/handle/123456789/139320

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