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Ellipsometric study of ion implanted copper surface and its room temperature oxidation

Ellipsometric study of ion implanted copper surface and its room temperature oxidation

The room temperature oxidation of ion-implanted copper surface has been studied ex situ and in situ using ellipsometry. The ellipsometric parameters T and Д were measured at light incidence angle 75° for different wavelength values in the range of 280 to 760 nm using averaging both over two azimutha...

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Bibliographic Details
Main Authors: Poperenko, L.V., Lohner, T., Stashchuk, V.S., Khanh, N.Q., Vinnichenko, M.V., Yurgelevych, I.V., Essam Ramadan Shaaban, Nosach, D.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2005
Series:Functional Materials
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/139709
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http://dspace.nbuv.gov.ua/handle/123456789/139709

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