Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity

The method of grids was used to calculate thermoelastic stresses on GaAs surface caused by a non-destructive laser exposure with diffraction spatial intensity modulation from a screen with a rectangular cut-out. The structure of irradiated near-surface layers of samples was studied using optical m...

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Збережено в:
Бібліографічні деталі
Дата:2006
Автори: Moskal, D., Nadtochiy, V., Golodenko, N.
Формат: Стаття
Мова:English
Опубліковано: НТК «Інститут монокристалів» НАН України 2006
Назва видання:Functional Materials
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/139940
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity / D. Moskal, V. Nadtochiy, N. Golodenko // Functional Materials. — 2006. — Т. 13, № 1. — С. 100-104. — Бібліогр.: 22 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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spelling irk-123456789-1399402018-06-22T03:03:21Z Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity Moskal, D. Nadtochiy, V. Golodenko, N. The method of grids was used to calculate thermoelastic stresses on GaAs surface caused by a non-destructive laser exposure with diffraction spatial intensity modulation from a screen with a rectangular cut-out. The structure of irradiated near-surface layers of samples was studied using optical method. Periodic insular structures formed due to diffusive redistribution of defects were revealed using the level-by-level chemical etching. Методом сеток проводился расчет термоупругих напряжений на поверхности GaAs, возникающих при неразрушающем лазерном облучении с дифракционной пространственной модуляцией интенсивности от непрозрачного экрана с прямоугольным вырезом. Оптическим методом исследовалась структура облученных приповерхностных слоев кристаллов. Послойным химическим травлением выявлены периодические островковые структуры, образованные в результате диффузионного перераспределения дефектов. Методом сiток виконано розрахунок термопружних напружень на поверхнi GaAs, що виникають при неруйнiвному лазерному опромiненнi з дифракцiйною просторовою модуляцiєю iнтенсивностi вiд непрозорого екрана з прямокутним вирiзом. Оптичним методом дослiджувалася структура опромiнених приповерхневих шарiв кристалiв. Пошаровим хiмiчним травленням виявленi перiодичнi острiвцевi структури, що утворенi внаслiдок дифузiйного перерозподiлу дефектiв. 2006 Article Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity / D. Moskal, V. Nadtochiy, N. Golodenko // Functional Materials. — 2006. — Т. 13, № 1. — С. 100-104. — Бібліогр.: 22 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/139940 en Functional Materials НТК «Інститут монокристалів» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description The method of grids was used to calculate thermoelastic stresses on GaAs surface caused by a non-destructive laser exposure with diffraction spatial intensity modulation from a screen with a rectangular cut-out. The structure of irradiated near-surface layers of samples was studied using optical method. Periodic insular structures formed due to diffusive redistribution of defects were revealed using the level-by-level chemical etching.
format Article
author Moskal, D.
Nadtochiy, V.
Golodenko, N.
spellingShingle Moskal, D.
Nadtochiy, V.
Golodenko, N.
Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
Functional Materials
author_facet Moskal, D.
Nadtochiy, V.
Golodenko, N.
author_sort Moskal, D.
title Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
title_short Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
title_full Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
title_fullStr Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
title_full_unstemmed Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity
title_sort periodic structure formation in gaas near-surface layer by laser beam with diffraction modulated intensity
publisher НТК «Інститут монокристалів» НАН України
publishDate 2006
url http://dspace.nbuv.gov.ua/handle/123456789/139940
citation_txt Periodic structure formation in GaAs near-surface layer by laser beam with diffraction modulated intensity / D. Moskal, V. Nadtochiy, N. Golodenko // Functional Materials. — 2006. — Т. 13, № 1. — С. 100-104. — Бібліогр.: 22 назв. — англ.
series Functional Materials
work_keys_str_mv AT moskald periodicstructureformationingaasnearsurfacelayerbylaserbeamwithdiffractionmodulatedintensity
AT nadtochiyv periodicstructureformationingaasnearsurfacelayerbylaserbeamwithdiffractionmodulatedintensity
AT golodenkon periodicstructureformationingaasnearsurfacelayerbylaserbeamwithdiffractionmodulatedintensity
first_indexed 2023-10-18T21:21:27Z
last_indexed 2023-10-18T21:21:27Z
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