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Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure

Photometric diagnostics of plasma of planar capacitive RF discharge in argon at 1 atm pressure

The results of study of the plasma parameters of radio frequency capacitive discharge with isolated electrodes in atmospheric-pressure argon by means of bremsstrahlung photometry in wavelength range 400…600 nm are presented. Time-averaged spatial distributions of the plasma electron temperature ar...

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Bibliographic Details
Main Authors: Bazhenov, V.Yu., Gubarev, S.M., Tsiolko, V.V., Levko, D.S.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Series:Вопросы атомной науки и техники
Subjects:
Низкотемпературная плазма и плазменные технологии
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/149059
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http://dspace.nbuv.gov.ua/handle/123456789/149059

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