Structure and properties of TiOx and TiNxOy coatings formed in vacuum ARC plasma fluxes

• Дата: 2018
• Автори: Belous, V.A., Lunyov, V.M., Kuprin, A.S., Bortnitskaya, M.A.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Назва видання: Вопросы атомной науки и техники
• Теми: Низкотемпературная плазма и плазменные технологии
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/149070
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Structure and properties of TiOx and TiNxOy coatings formed in vacuum ARC plasma fluxes / V.A. Belous, V.M. Lunyov, A.S. Kuprin, M.A. Bortnitskaya // Вопросы атомной науки и техники. — 2018. — № 6. — С. 297-299. — Бібліогр.: 11 назв. — англ.

The structure, microhardness and protective properties of titanium oxide and titanium oxynitride coatings formed in vacuum arc plasma fluxes depending on the negative potential on the substrate and the oxygen pressure, and also on the oxygen content in the gas mixture (N₂+ O₂) were studied. It is shown that titanium coatings deposited in a pure oxygen atmosphere at the pressure of 0.03 Pa represent a dispersed system of oxides in composition depends on the bias potential of the substrate. Unlike titanium oxide coatings, TiNxOy coatings are single-phase, which lattice parameter varies within the oxygen partial pressure. TiNxOy system has high microhardness (34 GPa), corrosion resistance and decorative properties of the coating deposition at optimal technological parameters.