Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric cha...
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| Дата: | 2018 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2018
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| Назва видання: | Functional Materials |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/157155 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-157155 |
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dspace |
| spelling |
irk-123456789-1571552019-06-20T01:27:09Z Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. Characterization and properties X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated. 2018 Article Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. 1027-5495 DOI:https://doi.org/10.15407/fm25.03.505 http://dspace.nbuv.gov.ua/handle/123456789/157155 en Functional Materials НТК «Інститут монокристалів» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Characterization and properties Characterization and properties |
| spellingShingle |
Characterization and properties Characterization and properties Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors Functional Materials |
| description |
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated. |
| format |
Article |
| author |
Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. |
| author_facet |
Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. |
| author_sort |
Pershyn, Yu.P. |
| title |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_short |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_full |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_fullStr |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_full_unstemmed |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_sort |
application of carbon as a barrier layer in sc/si multilayer x-ray mirrors |
| publisher |
НТК «Інститут монокристалів» НАН України |
| publishDate |
2018 |
| topic_facet |
Characterization and properties |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/157155 |
| citation_txt |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. |
| series |
Functional Materials |
| work_keys_str_mv |
AT pershynyup applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT devizenkoiyu applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT chumakvs applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT devizenkoayu applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT kondratenkovv applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors |
| first_indexed |
2023-05-20T17:51:36Z |
| last_indexed |
2023-05-20T17:51:36Z |
| _version_ |
1796154255676014592 |