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Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plot...
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| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2018
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| Series: | Functional Materials |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/157169 |
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