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Numerical simulation of multibeam systems by EL&ION code
Based on the tube method, taking into account the three second law for the current in each tube, the program EL&ION for preliminary rapid numerical analysis of the electron-optical system was developed, using which the system was developed for generating an ion beam of reactive gases with an ene...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194534 |
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