Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample

The dependences of the growth rate and intrinsic stress on the accelerating potential for coating TiN deposited from the Ti⁺ ion flow on the surface of cylindrical article are investigated theoretically. The sample rotates around the symmetry axis perpendicular to the flow of incident ions. The stud...

Full description

Saved in:
Bibliographic Details
Date:2019
Main Authors: Kalinichenko, A.I., Strel’nitskij, V.E.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
Series:Вопросы атомной науки и техники
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/194704
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample / A.I. Kalinichenko, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 142-144. — Бібліогр.: 6 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine