2025-02-22T16:08:50-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-194775%22&qt=morelikethis&rows=5
2025-02-22T16:08:50-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-194775%22&qt=morelikethis&rows=5
2025-02-22T16:08:50-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T16:08:50-05:00 DEBUG: Deserialized SOLR response

Potential part of electric field of ICP coil

ICP devices are widespread in modern technology, so the capacitive coupling in ICP is well known. It does not make a sufficient impact to the power deposition in plasma, and mostly it assumed to be a harmful effect [1]. Fortunately, making use of Faraday shield allows one to avoid a detail investiga...

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Bibliographic Details
Main Authors: Azarenkov, N.A., Gapon, A.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
Series:Вопросы атомной науки и техники
Subjects:
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/194775
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